The 78th JSAP Autumn Meeting 2017
Session ID : 5p-C11-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Theoretical study on interface orientation dependence of Si thermal oxidation based on Si emission model
*Takuya Nagura, Shingo Kawachi, Kenta Chokawa, Hiroki Shirakawa, Masaaki Araidai, Hiroyuki Kageshima, Tetsuo Endoh, Kenji Shiraishi
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