JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 78th JSAP Autumn Meeting 2017
Session ID : 7a-A301-9
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Selective epitaxial growth of doped GaN by pulsed sputtering
*Kohei UenoHideyuki ImabeppuAtsushi KobayashiJitsuo OhtaHiroshi Fujioka
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Keywords: 7a-A301-9, Sputtering, GaN
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© 2017 The Japan Society of Applied Physics
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