The 78th JSAP Autumn Meeting 2017
Session ID : 7p-C11-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Crystallinity improvement of MoS2 film by long throw high temperature sputtering with MoS2 target
*Takuro Sakamoto, Takumi Ohashi, Iriya Muneta, Kuniyuki Kakushima, Kazuo Tsutui, Hitoshi Wakabayashi
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