JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 78th JSAP Autumn Meeting 2017
Session ID : 8a-PA4-22
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Mist CVD growth of In2O3 films on α–Al2O3 using low temperature In2O3 buffer layer
*Takuya KobayashiTomohiro YamaguchiTakeyoshi OnumaTohru Honda
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Keywords: 8a-PA4-22, In2O3, mist CVD
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© 2017 The Japan Society of Applied Physics
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