The 78th JSAP Autumn Meeting 2017
Session ID : 6p-C19-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Development of Local DLTS Based on Super-Higher-Order Scanning Nonlinear Dielectric Microscopy and Its Application to MOS Interface Characterization
Keywords:
6p-C19-3,
Local deep level transient spectroscopy
Details
Article 1st page
