The 65th JSAP Spring Meeting 2018
Session ID : 17p-C204-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 65
Location : [in Japanese]
Date : March 17, 2018 - March 20, 2018
Diagnostics of microwave discharge low-pressure argon plasma by multi-optical emission line analysis based on collisional-radiative model
Keywords:
17p-C204-3,
low-pressure plasma diagnostics,
optical emission spectroscopic measurement,
collisional-radiative model
Details
Article 1st page
