The 65th JSAP Spring Meeting 2018
Session ID : 19p-C204-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 65
Location : [in Japanese]
Date : March 17, 2018 - March 20, 2018
Investigation of Ge Etching Mechanism by Neutral Beam Etching
*Shuichi Noda, Yosuke Tanimoto, Takuya Ozaki, Hideyuki Kurihara, Yasuyuki Hoshino, Kazuhiko Endo, Seiji Samukawa
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