The 65th JSAP Spring Meeting 2018
Session ID : 20a-C204-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 65
Location : [in Japanese]
Date : March 17, 2018 - March 20, 2018
High-rate synthesis of fluorocarbon film using a concentrated CF4 gas by sub-atmospheric pressure plasma and evaluation of the film property
*Tomoyuki Tanaka, Kikura Jou, Takemoto Hiroki, Kakiuchi Hiroaki, Yasutake Kiyoshi, Ohmi Hiromasa
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