The 65th JSAP Spring Meeting 2018
Session ID : 17p-P7-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 65
Location : [in Japanese]
Date : March 17, 2018 - March 20, 2018
Evaluation of the process characteristics of aluminum-assisted chemical vapor etching
Keywords:
17p-P7-1,
Al-assisted chemical vapor etching,
Silicon dioxide,
High speed anisotropic chemical etching
Details
Article 1st page
