The 65th JSAP Spring Meeting 2018
Session ID : 20p-C101-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 65
Location : [in Japanese]
Date : March 17, 2018 - March 20, 2018
Development and Characterizaion Minimal Plasma tool for Metal Etching
*Masashi Kase, Hiroyuki Tanaka, Yoshiyuki Nozawa, Toshiyasu Hayami, Sommawan Khumpuang, Shiro Hara
Author information
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