The 65th JSAP Spring Meeting 2018
Session ID : 18p-E201-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 65
Location : [in Japanese]
Date : March 17, 2018 - March 20, 2018
Preparation of dielectric distributed Bragg reflectors by the reactive helicon-wave-excited-plasma sputtering method (1)
*Takumi Kasuya, Kohei Shima, Kiyoshi Kikuchi, Kazunobu Kojima, Shigefusa Chichibu
Author information
Keywords:
18p-E201-6,
Reactive helicon-wave-excited-plasma sputtering method,
Distributed Bragg reflectors,
ZrO2
Details
Article 1st page
