The 65th JSAP Spring Meeting 2018
Session ID : 19p-P2-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 65
Location : [in Japanese]
Date : March 17, 2018 - March 20, 2018
Evaluation of piezoelectric Ta2O5 thin film by the line-focus-beam ultrasonic material characterization system
*Ryota Suenaga, Masashi Suzuki, Shoji Kakio, Yuji Ohashi, Mototaka Arakawa, Jun-ichi Kushibiki
Author information
Keywords:
19p-P2-7,
surface acoustic wave,
line-focus-beam ultrasonic material characterization system
Details
Article 1st page
