JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 79th JSAP Autumn Meeting 2018
Session ID : 21p-232-3
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Electrical Properties of Heteroepitaxial Diamond with Chemical Mechanical Planarization
*Yutaka KimuraSeong-Woo KimSatoshi MasuyaKoki OyamaKenjiro IkejiriMakoto Kasu
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© 2018 The Japan Society of Applied Physics
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