The 79th JSAP Autumn Meeting 2018
Session ID : 20p-PA5-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 79
Location : [in Japanese]
Date : September 18, 2018 - September 21, 2018
Macro-pulse design and optical emission spectroscopy for plasma generated by high-power pulsed magnetron sputtering using modulated pulsed power system
*Yuki Nakagomi, Hiroshi Nishida, Yoshihiro Hirai, Nobuo Nishimiya, Masaomi Sanekata, Hiroaki Yamamoto, Masahide Tona, Keizo Tsukamoto, Keijiro Ohshimo, Fuminori Misaizu
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