The 79th JSAP Autumn Meeting 2018
Session ID : 20a-438-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 79
Location : [in Japanese]
Date : September 18, 2018 - September 21, 2018
Defect termination mechanism of amorphous carbon films by atomic hydrogen
*Yasuyuki Ohashi, Hirotsugu Sugiura, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Masaru Hori
Author information
Details
Article 1st page
