The 79th JSAP Autumn Meeting 2018
Session ID : 21p-135-12
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 79
Location : [in Japanese]
Date : September 18, 2018 - September 21, 2018
Development of Alkaline Solution generated by Electrolysis of Organic Ammonium Salt for Wet and Cleaning Process in Semiconductor Manufacturing -Elucidation of hypochlorite ion decomposition reaction mechanism by organic cation species-
Keywords:
21p-135-12,
semiconductor
Details
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