The 79th JSAP Autumn Meeting 2018
Session ID : 18p-PA6-13
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 79
Location : [in Japanese]
Date : September 18, 2018 - September 21, 2018
Influence of surface cleaning on electrical characteristics of β-Ga2O3/Al2O3/Pt MOS capacitors
*Masafumi Hirose, Toshihide Nabatame, Kazuya Yuge, Erika Maeda, Akihiko Ohi, Naoki Ikeda, Yoshihiro Irokawa, Yasuo Koide, Tomoji Ohishi
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