The 79th JSAP Autumn Meeting 2018
Session ID : 19p-CE-14
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 79
Location : [in Japanese]
Date : September 18, 2018 - September 21, 2018
Damage characterization of GaN substrate with hot implant process by TEM(Ⅱ)
*Junko Maekawa, Hitoshi Kawanowa, Masahiko Aoki, Katsumi Takahiro, Toshiyuki Isshiki
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