JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 79th JSAP Autumn Meeting 2018
Session ID : 18p-PB3-87
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Improvement of an ALD-grown Al2O3 film on WSe2 by surface oxidation
*Yosuke MachidaKeiji Ueno
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© 2018 The Japan Society of Applied Physics
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