JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 79th JSAP Autumn Meeting 2018
Session ID : 20p-212A-3
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Effect of the surface step structures on the responsivity of the MEMS terahertz bolometers
*Boqi QiuYa ZhangNaomi NagaiKazuhiko Hirakawa
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© 2018 The Japan Society of Applied Physics
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