JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 66th JSAP Spring Meeting 2019
Session ID : 9p-PA3-1
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Spring Meeting

Number : 66

Location : [in Japanese]

Date : March 09, 2019 - March 12, 2019

Local structure analysis of Si-containing DLC films (II)
*Kazuhiro Kanda, Takayuki Hasegawa, Hiroki Akasaka
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Keywords: 9p-PA3-1, Si-containing diamond-like carbon film, X-ray absorption fine structure
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