The 66th JSAP Spring Meeting 2019
Session ID : 10p-M103-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 66
Location : [in Japanese]
Date : March 09, 2019 - March 12, 2019
Challenge to carbon hard mask for high aspect ratio dielectric film patterning
Details
Article 1st page
