The 66th JSAP Spring Meeting 2019
Session ID : 10p-M103-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 66
Location : [in Japanese]
Date : March 09, 2019 - March 12, 2019
In-situ transmission electron microscopy observation of layer-by-layer etching of graphene under remote oxygen plasma irradiation
*Hirotsugu Sugiura, Hiroki Kondo, Kimitaka Higuchi, Shigeo Arai, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori
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