The 66th JSAP Spring Meeting 2019
Session ID : 11a-W521-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 66
Location : [in Japanese]
Date : March 09, 2019 - March 12, 2019
Evaluation of film quality by various deposition condition of MOCVD MoS2 film using i-Pr2DADMo(CO)3 as Mo precursor
*Kota Yamazaki, Yusuke Hibino, Seiya Ishihara, Yuya Oyanagi, Yusuke Hashimoto, Naomi Sawamoto, Hideaki Machida, Manato Ishikawa, Hiroshi Sudo, Hitoshi Wakabayashi, Atushi Ogura
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