JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 80th JSAP Autumn Meeting 2019
Session ID : 19p-E206-15
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Autumn Meeting

Number : 80

Location : [in Japanese]

Date : September 18, 2019 - September 21, 2019

Selective-area chemical vapor deposition of Ge on SiNx layers
*Yuki Ueno, Ryota Oyamada, Shun Sasaki, Tetsuya Nakai, Yasuhiko Ishikawa
Author information
Keywords: 19p-E206-15, silicon photonics, silicon nitride, germanium
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (362K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2019 The Japan Society of Applied Physics
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top