The 80th JSAP Autumn Meeting 2019
Session ID : 20a-C309-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Control of the preferential orientation and the crystal structure of HfO2:Y/Si films by change in oxygen partial pressure
*Yuki Saho, Daiki Kamada, Kenshi Takada, Daisuke Kiriya, Takeshi Yoshimura, Atsushi Ashida, Norifumi Fujimura
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