The 80th JSAP Autumn Meeting 2019
Session ID : 20a-C309-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Characteristics of the Hf0.5Zr0.5O2 Thin Films Grown by a Chemical Solution Deposition Method
*Taichi Inoue, Hiroshi Ota, Ryota Nakamura, Yuichi Hirohuji, Masatoshi Koyama, Kazuto Koike, Mitsuaki Yano
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