JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 80th JSAP Autumn Meeting 2019
Session ID : 20p-E312-2
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Angle-resolved Hard X-ray Photoelectron Spectroscopy Study of ICP etching Damage Layer on Diamond Surface
*Reito WadaKouhei TakizawaYukako KatoMasahiko OguraToshiharu MakinoSatoshi YamasakiHiroshi Nohira
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© 2019 The Japan Society of Applied Physics
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