The 80th JSAP Autumn Meeting 2019
Session ID : 20p-E312-13
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
The highly efficient p-type B doping into type IIa diamond substrate by 11B+ ion implantation at room temperature and subsequent annealing at 1150°C and 1300°C
Details
Article 1st page
