JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 80th JSAP Autumn Meeting 2019
Session ID : 21a-PA2-22
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Effects of in-situ post-annealing for crystalline structures and electrical properties of Al-doped ZnO films on the glass substrate in magnetron sputtering
*Toshiki SuwaTadashi NakamuraKunio Okimura
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© 2019 The Japan Society of Applied Physics
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