The 80th JSAP Autumn Meeting 2019
Session ID : 18a-PA6-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Measurement of ion energy distribution with Faraday cup in dual frequency capacitively-coupled plasma
*Akihiro Mitsuya, Makoto Moriyama, Naoya Nakahara, Haruka Suzuki, Hirotaka Toyoda
Author information
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