The 80th JSAP Autumn Meeting 2019
Session ID : 20a-B11-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Pulse and power controls in modulated pulsed power magnetron sputtering and the optical emission spectroscopy
*Yuki Nakagomi, Tatsuya Watabe, Mutsuki Hirayama, Ryosuke Kaneyuki, Nobuo Nishimiya, Masaomi Sanekata, Hiroaki Yamamoto, Masahide Tona, Keizo Tsukamoto, Keijiro Ohshimo, Fuminori Misaizu
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