The 80th JSAP Autumn Meeting 2019
Session ID : 18a-C309-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Cyclic etching of tin-doped indium oxide using hydrogen-induced modified layer
*Akiko Hirata, Masanaga Fukasawa, Kazunori Nagahata, Hu Li, Kazuhiro Karahashi, Satoshi Hamaguchi, Tetsuya Tatsumi
Author information
Keywords:
18a-C309-5,
JSAP Paper Award Speech
Details
Article 1st page
