The 80th JSAP Autumn Meeting 2019
Session ID : 18p-C309-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
The behavior of ions in TiN sputtering plasma using high power impulse magnetron sputtering
Details
Article 1st page
