The 80th JSAP Autumn Meeting 2019
Session ID : 20p-N304-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Dependence of chlorine adsorption layer on ion energy on Ar ion-irradiated GaN surface
*Masaki Hasegawa, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine, Kenji Ishikawa, Masaru Hori
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