The 80th JSAP Autumn Meeting 2019
Session ID : 18p-F211-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Time Evolution of Deposition of Carbon Nanoparticles Synthesized by Ar+CH4 Plasmas
*SungHwa Hwang, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
Author information
Keywords:
18p-F211-6,
Plasma Electronics English Session,
carbon nanoparticles,
plasma chemical vapor deposition
Details
Article 1st page
