The 80th JSAP Autumn Meeting 2019
Session ID : 19p-PB2-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
SOI-Si/4H-SiC pixel array fabrication process for radiation hardened image sensors
*Tatsuya Meguro, Fumiaki Hasebe, Akinori Takeyama, Takeshi Ohshima, Yasunori Tanaka, Shin-Ichiro Kuroki
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