The 80th JSAP Autumn Meeting 2019
Session ID : 19p-PB3-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Effects of the doping species on β-Ga2O3 dry etching
Details
Article 1st page
