JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 80th JSAP Autumn Meeting 2019
Session ID : 21a-E301-10
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Ti/Al thickness dependence of ohmic contact resistances for AlGaN/AlN/GaN HEMT structures with thin AlGaN barrier layer
*Yoshimi YamashitaIssei WatanabeAkifumi Kasamatsu
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Keywords: 21a-E301-10, GaN, HEMT, AlGaN
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© 2019 The Japan Society of Applied Physics
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