The 80th JSAP Autumn Meeting 2019
Session ID : 20p-E313-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Analysis and structural optimization of capacitance manometer for semiconductor manufacturing by direct simulation Monte Carlo method
Keywords:
20p-E313-6,
semiconductor manufacturing process,
capacitance manometer,
direct simulation Monte Carlo method
Details
Article 1st page
