JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 80th JSAP Autumn Meeting 2019
Session ID : 21a-B31-2
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Reactive-ion etching damage of ZnO and recovery by HCl dipping
*Taizo NakasuKohei ShimaKazunobu KojimaShigefusa Chichibu
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© 2019 The Japan Society of Applied Physics
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