The 80th JSAP Autumn Meeting 2019
Session ID : 21a-B31-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Influence of Indium-precursors on Halide Vapor Phase Epitaxy of In2O3
*Kenta Nagai, Nami Tanaka, Yuya Saimoto, Rie Togashi, Nao Takekawa, Ken Goto, Yoshinao Kumagai
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