The 67th JSAP Spring Meeting 2020
Session ID : 13p-PA8-15
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
The film modification of Si-containing hydrogenated DLC films by the soft X-ray irradiation
*Kazuhiro Kanda, Shotaro Tanaka, Masahito Niibe, Takayuki Hasegawa, Tsuneo Suzuki
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