The 67th JSAP Spring Meeting 2020
Session ID : 12p-A205-13
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
Prediction Scheme for Long-Term Electrical Reliability of Plasma-Damaged SiO2 Films Based on the Percolation Theory
Details
Article 1st page
