The 67th JSAP Spring Meeting 2020
Session ID : 14a-A202-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
Investigation of RF sputtering conditions for high-photoresponsivity BaSi2 films
*Taira Nemoto, Takuma Sato, Masami Mesuda, Hideto Kuramochi, Kaoru Toko, Takashi Suemasu
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