JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 67th JSAP Spring Meeting 2020
Session ID : 15a-A305-1
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Spring Meeting

Number : 67

Location : [in Japanese]

Date : March 12, 2020 - March 15, 2020

Theoretical study on emitted Si in Si oxide films
*Hiroyuki Kageshima, Yuji Yajima, Kenji Shiraishi, Tetsuo Endoh
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Keywords: 15a-A305-1, Si oxidation, First-principles calculation
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