The 67th JSAP Spring Meeting 2020
Session ID : 14a-A305-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
TiN Film Characteristics Deposited by Minimal Fab Reactive Sputtering Tool (4)
*Shuichi Noda, Kazuhiro Koga, Fumito Imura, Kazumasa Nemoto, Yuuki Yabuta, Yamamoto Naoko, Ryuichiro Kamei, Sommawan Khumpuang, Shiro Hara
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