The 67th JSAP Spring Meeting 2020
Session ID : 14p-A305-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
The low temperature fabrication of gate-first Schottky barrier pMOSFET with PdErSi source and drain
Details
Article 1st page
