JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 67th JSAP Spring Meeting 2020
Session ID : 14p-A305-9
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Miniaturized Piezoelectric MEMS 2D mirror for Endoscope
*Rintaro ShimadaKensuke KandaTakayuki FujitaKazusuke Maenaka
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Keywords: 14p-A305-9, MEMS, PZT
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© 2020 The Japan Society of Applied Physics
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