The 67th JSAP Spring Meeting 2020
Session ID : 14p-A305-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
A Study on Single-Proof-Mass 3-axis MEMS Accelerometer with Pillar-Shaped Electrodes
*Ken Atsumi, Tatsuya Koga, Takashi Ichikawa, Daisuke Yamane, Shin-ichi Iida, Hiroyuki Ito, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
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